Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer

Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer

Blog Article

There are two critical parameters for microbolometers: the temperature coefficient of resistance (TCR) of the sensing material, and the thermal conductance of the insulation structure.Cytochrome c protein, having a high TCR, is a good candidate for infrared detection.We can use storm pourers SU-8 photoresist for the thermal insulation structure, given its low thermal conductance.

In this study, we designed a platform structure based on a SU-8 photoresist.We fabricated an infrared sensing pixel and recorded a high TCR for this new structure.The SU-8 photoresist insulation structure was fabricated using the exposure dose method.

We 15-eg1053cl experimentally demonstrated high values of TCR from 22%/K to 25.7%/K, and the measured noise was 1.2 × 10–8 V2/Hz at 60 Hz.

When the bias current was 2 μA, the calculated voltage responsivity was 1.16 × 105 V/W.This study presents a new kind of microbolometer based on cytochrome c protein on top of an SU-8 photoresist platform that does not require expensive vacuum deposition equipment.